Semiconductor Pumps (UPW, CMP, Photochem, Waste Neutralization)
Fab uptime depends on ultrapure materials, leak-free transfer, and stable pressure. We specify fluoropolymer mag-drive for photochemicals and acids, multistage/inline for UPW distribution, peristaltic for CMP slurries and off-gassing mixes, and digital metering for neutralization and point-of-use treatment. Brands: Iwaki, Finish Thompson, Grundfos, LMI, Neptune, Emec, Walchem, Flux, J.L. Wingert, BJM, Gorman-Rupp, Netzsch, Wilden, Yamada, ARO, Goulds, Griswold.
Best-Fit Pumps for Semiconductor Duty
| Service | Best Pump Type | Recommended Brands | Why It’s Best |
|---|---|---|---|
| Photochem & high-purity acids/solvents | Fluoropolymer mag-drive (PFA/PVDF/ETFE) | Iwaki MX/MD; Finish Thompson DB/UC | Sealless containment, ultra-clean wetted path, broad compatibility |
| UPW distribution/recirculation | Multistage / Vertical inline centrifugal | Grundfos CR / TPE | Quiet, efficient pressure control with VFD; clean materials of construction |
| CMP slurry feed/return | Peristaltic (process hose) / AODD (abrasion kits) | Graco (peristaltic); Wilden; Yamada; ARO | Handles abrasives and air entrainment; hose-only wetted path for quick changeout |
| Neutralization & pH trim | Digital diaphragm / Peristaltic metering | LMI PD/TD & KML/KBL; Neptune; Emec; Walchem (control) | Accurate ppm with validation hardware and clean installation |
| Slurry reclaim / waste pits | Submersible solids-handling / Self-priming | BJM; Gorman-Rupp | Rugged handling of fines and variable load; easy service |
| Viscous resists/adhesives | Progressive-cavity (low-shear, VFD) | Netzsch | Pulse-free flow protects rheology; gentle handling of high viscosity |
| Drum/IBC photochem & slurry loading | Drum/IBC pump + injection hardware | Flux; J.L. Wingert (columns, quills) | Ergonomic transfers with calibrated injection and sampling |
Cleanroom note: We align wetted materials and elastomers to purity goals and SDS, and can provide grounding/bonding guidance on carts/skids.
Recommended Semiconductor Packages (Placeholders)
Tip Share chem list (SDS), purity goals, viscosity/solids, duty points, and cleanroom constraints. We’ll return curves and a fab-serviceable BOM.
How We Engineer Fab Duty
- Containment: sealless mag-drive for photochem/acid; proper venting and secondary containment.
- Purity: clean wetted paths and elastomers aligned to UPW/CMP chemistries.
- Shear & abrasion: peristaltic/AODD for slurries; low-shear PC for viscous materials.
- Controls: VFD pressure sets and closed-loop metering for stable ppm.
- Serviceability: quick-change hoses, isolation, drains/vents, standardized kits.
Common Semiconductor Uses
- UPW loop distribution/recirculation
- Photochem and acid transfer
- CMP slurry feed/return
- Neutralization and pH trim
- Filter feed/backwash
- Resist/adhesive transfer
- Drum/IBC photochem & slurry loading
- Scrubber & wastewater duty
- Equipment room sumps
- Portable cart transfers
Leak-Free Chem Transfer. Stable Pressure. Fab-Ready.
Send chem list (SDS), purity targets, viscosity/solids, duty points, and cleanroom constraints. We’ll return curves and a compliant, maintainable package.
Semiconductor Pump FAQs
Why fluoropolymer mag-drive for photochem/acid?
Sealless containment with PFA/PVDF/ETFE wetted paths minimizes leak paths and supports compatibility with many aggressive fab chemicals.
Peristaltic vs. AODD for CMP slurry?
Peristaltic shines for abrasive and air-entrained slurries with quick hose swaps; AODD works well for portable carts and variability. We’ll size to your slurry and duty point.
What drives UPW loop pump selection?
Required head/flow, noise limits, materials, and controls. Multistage/inline with VFD provides quiet, stable pressure and easy service.